The smart Trick of CLBO Crystal That No One is Discussing
The smart Trick of CLBO Crystal That No One is Discussing
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We summarized the current improvement position of your superior-electrical power DUV laser both equally with the wavelength of FHG from the one-μm laser and at 193 nm. The current development with the solid-condition/fiber laser, and also the nonlinear optical crystals, prompts not simply the typical ability but additionally the beam top quality (coherence) of your DUV lasers to an unprecedented stage.
The typical electrical power from the NIR laser still has the probable to get enhanced to tens of watts which include 70 W [26] Should the double-move configuration could possibly be utilized to the Yb:YAG SCF amplifier stage. Therefore, if the conversion performance of 31% from NIR to DUV could be nevertheless managed at this larger ability problem, the standard output energy on the DUV laser at 258 nm may be much more than 20 W, which would be described as a exceptional electric power degree for that DUV laser and lead to the unanticipated DUV laser machining final results. Also, for top-power DUV laser, the UV injury with the nonlinear crystal, such as the Home windows for CLBO crystal plus the mirrors, is an additional critical parameter for long-lasting and stable Procedure.
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Each the 1040 nm and 1078 nm laser come from just one twin-wavelength Yb-doped fiber laser. Just about every laser is amplified by phases of fiber amplifier and Yb-doped resources amplifier, respectively.
On the opposite side, the ability scaling on the NIR laser is an additional facet to raise the common energy of the 193-nm DUV laser. Mainly because of the deficiency of the higher-ability amplification Resolution from the NIR laser (such as at 1553 nm), nonlinear frequency processes which include optical parameter oscillation (OPO) might be placed on develop a wavelength converter by shifting the wavelength from one μm to the specified wavelength along with getting relative larger ability [21]. A short while ago, a diamond Raman laser showed its skill in reaching a significant power plus a high conversion effectiveness at the 1st Stokes from the 1-μm laser [22,23], which implies the possibility being utilized during the 193-nm DUV laser generation on account of its significant Raman attain and large frequency shift.
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The heartbeat duration of the next Stokes light was shortened to five ns as demonstrated in Figure 7a, only one-shot image in the oscilloscope, which is a standard phenomenon in Raman laser [forty four] although the pulse length of your pump laser was ten ns.
What's more, combining the sound-condition laser with other nonlinear process for example stimulated Raman scattering, NIR lasers can be attained at new wavelengths with higher electricity and superior beam good quality, which was analyzed because of the evidence-of-basic principle experiment. This Raman laser plan offers a fresh route to the substantial-ability DUV laser, Specifically in the wavelength of 193 nm.
The beam profile proven in Determine 7b demonstrated an excellent beam high-quality as among the merits of Raman laser, which would be useful to deliver a 193-nm DUV laser with a top quality beam.
The conversion effectiveness from elementary NIR to DUV is from 5% to 36% in accordance with the documented results in Desk 1. Expanding the conversion effectiveness will lessen the burden on the look and more info setup of the basic laser amplifier as well as the electrical electrical power use. An excellent beam high-quality of the fundamental laser can even add towards the raising of the conversion efficiency and also the right power intensity from the NIR and eco-friendly laser in the SHG and FHG method, respectively. The highest conversion efficiencies from NIR to green and green to DUV laser by utilization of CLBO crystal are 70% and all around 50%, respectively [12], which corresponds for the conversion effectiveness of 35% from basic to DUV.
The development with the 193-nm laser was demonstrated by phases of SFG. To be able to scale the DUV laser energy successfully, a completely new notion of your 193-nm DUV laser generation is offered dependant on the diamond Raman laser.